Vacuum Pump Inlet Trap for Heavy Contaminant Vacuum Processes
June 1, 2025
A high-capacity vacuum pump inlet trap designed to remove high quantities of contaminants from LPCVD, PECVD, MOCVD, HVPE, ALD and similar processes has been introduced by Mass-Vac, Inc.
The MV Multi-Trap 16" High-Capacity Vacuum Inlet trap for heavy contaminant producing processes features a stainless steel housing with a large knockdown stage and a large pleated filter made from high-temperature polyester to capture and retain large quantities of particulates. Offered in a single or stacked configuration, it is available with NW-40 to ISO-160 ports in straight-through and right angle configurations.
Providing a conductance of > 2000 CFM at 1 TORR, the MV Multi-Trap 16" High-Capacity Vacuum Inlet Trap can be supplied with 25- and 100-micron polyester ratings. The single stage filter has a 40 sq. ft. surface area and the stacked version provides 80 sq. ft. and they trap 60 grams/sq. ft. of particulates. A cooling option is offered for condensable materials.
For more information contact:
Mass-Vac, Inc.
247 Rangeway Rd.
P.O. Box 359
North Billerica, MA 01862-0359
978-667-2393
< back